|
|||||
|
|
Epitaxial Growth of Zinc Sulfide by Atomic Layer Deposition on SiC/Si Hybrid Substrates |
|
| Authors: | Antipov V V Kukushkin S A Osipov A V |
| Affiliation: | 1.St. Petersburg State University of Technology, 190013, St. Petersburg, Russia ;2.National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia ;3.Institute for Problems of Mechanical Engineering, Russian Academy of Sciences, 199178, St. Petersburg, Russia ; |
| Abstract: | Technical Physics Letters - Epitaxial films of zinc sulfide on silicon were obtained by atomic layer deposition (ALD). In order to avoid the interaction between silicon and zinc sulfide, a... |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |
