Perspective:optically-pumped Ⅲ–Ⅴ quantum dot microcavity lasers via CMOS compatible patterned Si (001) substrates |
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作者姓名: | Wenqi Wei Qi Feng Zihao Wang Ting Wang Jianjun Zhang |
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作者单位: | Institute of Physics;Center of Materials Science and Optoelectronic Engineering |
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基金项目: | financial support was provided by the National Natural Science Foundation of China (Nos. 61635011, 11574356, 11434010, 61804177 and 11804382);National Key Research and Development Program of China (Nos. 2016YFA0300600 and 2016YFA0301700);Key Research Program of Frontier Sciences, CAS (No. QYZDB-SSW-JSC009);Ting Wang was supported by the Youth Innovation Promotion Association of CAS (No. 2018011) |
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摘 要: | Direct epitaxial growthⅢ–Ⅴquantum dot(QD)structures on CMOS-compatible silicon substrates is considered as one of the most promising approaches to achieve low-cost and high-yield Si-based lasers for silicon photonic integration.However,epitaxial growth ofⅢ–Ⅴmaterials on Si encounters the following three major challenges:high density of threading dislocations,antiphase boundaries and thermal cracks,which significantly degrade the crystal quality and potential device performance.In this review,we will focus on some recent results related to InAs/GaAs quantum dot lasers on Si(001)substrates byⅢ–Ⅴ/Ⅳhybrid epitaxial growth via(111)-faceted Si hollow structures.Moreover,by using the step-graded epitaxial growth process the emission wavelength of InAs QDs can be extended from O-band to C/L-band.High-performance InAs/GaAs QD microdisk lasers with sub-milliwatts threshold on Si(001)substrates are fabricated and characterized.The above results pave a promising path towards the on-chip lasers for optical interconnect applications.
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关 键 词: | quantum DOTS silicon PHOTONICS EPITAXIAL growth semiconductor LASERS |
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