互补式双层时栅角位移传感器研究

针对当前研制的双层时栅角位移传感器感应信号幅值小、时变磁场的均匀有效面积利用率低等问题，在原有“八”字形半正弦结构的基础上提出了一种双层互补式时栅角位移传感器设计方案。根据双层时栅位移传感器的特点，建立了其空间磁场分布模型，验证了双层时栅角位移传感器的互补式结构在构成行波上的优势；根据激励线圈的磁场分布规律进行建模，得到该参数状态下双层平面激励线圈的间距为0.235 mm。最后进行了有限元仿真分析和实验验证。仿真分析表明：采用互补式结构能有效增大感应信号强度，传感器的短周期误差峰峰值显著降低，能够有效抑制角度误差中的1次谐波和4次谐波。实验数据表明：传感器短周期原始误差为(-13.61″,13.30″),修正后误差为(-3.01″,0.78″);传感器长周期原始误差为(-19.60″,21.96″),修正后误差为(-2.62″,3.30″);相比单层“U”字形结构，1次误差减小了66.3%,4次误差减小了25.3%。

Research on Complementary Double-layer Time-grid Angular Displacement Sensor

Aiming at the problems of the small amplitude of the induction signals and the low utilization rate of the uniform effective area of the time-varying magnetic field of the double-layer time-grid angular displacement sensors developed in the early stage， a double-layer complementary time-grid angular displacement sensor was proposed based on the original “figure-eight” half-sine structure. According to the characteristics of the double-layer time-grid displacement sensors， the spatial magnetic field distribution models were established， and the advantages of the complementary structure of the double-layer time-grid angular displacement sensors in forming traveling waves were verified. According to the magnetic field distribution of the excitation coil， the space between the double-layer planar excitation coil under this parameter state was as 0.235 mm. Finally， finite element simulation analysis and experimental verification were carried out. The simulation results show that the complementary structure may effectively increase the induction signal intensity， the peak-to-peak values of the short-period errors are significantly reduced， which may effectively suppress the 1st harmonic and the 4th harmonic in the angle errors. The experimental data shows that the original short-period error of the sensors is （-13.61″， 13.30″）， and the corrected error is （-3.01″， 0.78″）； the original long-period error of the sensor is （-19.60″， 21.96″）， and the corrected error is （-2.62″， 3.30″）， which reduces the primary errors by 66.3% compared to the single-layer “U”-shaped structure， the 4th time error is reduced by 25.3%.