| 真空弧源沉积类金刚石薄膜及其性能研究 |
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| 引用本文： | 冷永祥,黄楠,孙鸿,陈俊英,万国江,王进.真空弧源沉积类金刚石薄膜及其性能研究[J].功能材料,2003,34(2):229-230. |
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| 作者姓名： | 冷永祥 黄楠 孙鸿 陈俊英 万国江 王进 |
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| 作者单位： | 西南交通大学,材料学院生物材料及表面工程研究所,四川,成都,610031 |
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| 基金项目： | 国家自然科学基金资助项目(NSFC39870199)，国家重点基础研究规划项目(G199064706)，国家高技术研究发展计划资助项目(102-12-09-1) |
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| 摘 要： | 采用真空弧源沉积技术在钛合金及Si(100)表面合成DLC薄膜．通入不同的氩气．控制DLC薄膜中的SP3／SP2比值。研究表明，薄膜硬度可达96GPa．随着氩气流量的增加，薄膜的硬度先增加．后有明显降低。随着氩气流量的增加，类金刚石薄膜中．SP2键增加，SP3键减少，而血液相容性明显提高。DLC薄膜具有优异的耐磨性，摩擦系数低，与钛合金基体结合牢固。
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| 关 键 词： | 真空弧源沉积 类金刚石薄膜 血液相容性 纳米硬度 耐磨性 生物材料 |
| 文章编号： | 1001-9731(2003)02-0229-02 |
| 修稿时间： | 2002年4月29日 |
The properties of DLC films synthesized by vacuum arc source deposition |
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| LENG Yong-xiang,HUANG Nan,SUN Hong,CHEN Jun-ying,WAN Guo-jiang,WANG Jin.The properties of DLC films synthesized by vacuum arc source deposition[J].Journal of Functional Materials,2003,34(2):229-230. |
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| Authors: | LENG Yong-xiang HUANG Nan SUN Hong CHEN Jun-ying WAN Guo-jiang WANG Jin |
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| Abstract: | The DLC films were synthesized on the Ti6A14V and Si(100) substrate by vacuum were source deposition. The DLC films with different concentration ration of SP3 versus SP2 bonded carbon atoms were synthesized by bled different argon gas. The nano-hardness of the DLC film can reach 96GPa. The nano-hardness first increased and then decreases as the argon inlet increasing. When the argon inlet increased, the concentration ration of SP3 versus SP2 bonded carbon atoms decreased, but the blood compatibility of the DLC films increased. The DLC films have high wear resistance, low friction and good adherence with Ti6Al4V. |
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| Keywords: | diamond like carbon blood compatibility nano-hardness wear resistance |
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