|
|||||
|
|
Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes |
|
| Authors: | Yuichiro Ezoe Ikuyuki Mitsuishi Utako Takagi Masaki Koshiishi Kazuhisa Mitsuda Noriko Y Yamasaki Takaya Ohashi Fumiki Kato Susumu Sugiyama Raul E Riveros Hitomi Yamaguchi Shinya Fujihira Yoshiaki Kanamori Kohei Morishita Kazuo Nakajima Ryutaro Maeda |
| Affiliation: | 1. Tokyo Metropolitan University, 1-1 Minami-Osawa, Hachioji, Tokyo, 192-0397, Japan 2. Institute of Space and Astronautical Science (ISAS), Japan Aerospace Exploration Agency (JAXA), 3-1-1 Yoshinodai, Sagamihara, Kanagawa, 229-8510, Japan 3. Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu, Shiga, 525-8577, Japan 4. University of Florida, 226 MAE-B, Gainesville, FL, 32911, USA 5. Tohoku University, 6-6-1 Aramaki-Aza-Aoba, Aoba, Sendai, Miyagi, 980-8579, Japan 6. Tohoku University, 2-1-1 Katahira, Aoba, Sendai, Miyagi, 980-8577, Japan 7. National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan |
| Abstract: | We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. In our method, curvilinear micro pore structures are firstly fabricated by silicon deep reactive ion etching (DRIE) or X-ray LIGA processes. Secondly, side walls of the micro structures are smoothed by magnetic field assisted finishing and/or hydrogen annealing techniques for high reflectivity mirrors. Thirdly, to focus parallel X-ray lights from astronomical objects, these structures are elastically or plastically bent into a spherical shape. Fourthly, the bent structures are stacked to form a multi-stage X-ray telescope. In this paper, we report on fabrication and X-ray reflection tests of silicon and nickel X-ray mirrors using the DRIE and LIGA processes, respectively. For the first time, X-ray reflections were confirmed on both of the mirrors. Estimated rms roughnesses were 5 nm and 3 nm for the silicon and nickel mirrors, respectively. |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |
