基于MEMS技术的微型热导检测器的研制

文中采用MEMS技术加工研制了一种新型热导检测器,这种微型热导检测器采用电阻率高、电阻温度系数大的Pt热敏电阻,利用MEMS技术将Pt薄膜沉积在Pyrex 7740玻璃上并通过剥离技术获得热敏电阻,而气体通道以及热导池是通过深刻蚀在硅片上刻蚀得到,热导池的体积为0.4 μL.这种热导检测器具有灵敏度高,不受气流影响,不易氧化等特点,适用各种混合气体分离检测.

Study of MEMS-based Microfabricated Thermal Conductivity Detector

A new micro thermal conductivity detector based on MEMS (micro electro mechanical system) technology was described.The thermal material Pt,which has high resistivity and high temperature coefficient of resistance,was directly deposited on the Pyrex 7740 glass using sputter technology and used as thermal resistance.The micro flow channels and thermal conductivity cell were fabricated on silicon using Deep Reactive-Ion Etching (DRIE) technology.The volume of the thermal conductivity cell is 0.4 μL.The instrument has the characteristics of high sensitivity,unaffected by gas flow,non-oxidizable and portable for ambient air quality monitoring and industrial exhaust gas analysis.