微反射镜阵列在光束整形中的应用

在激光的实际应用中，需要利用光束整形技术将激光器的输出光束调制为期望的光强分布。微机电系统的发展为光束整形提供了一种解决方案。采用微反射镜阵列，实现了激光光束的整形。基于随机化的思想提出了相应的算法，分析了算法在不同单元数目和不同噪声水平下的表现，为实际应用提供了有价值的参考依据。最后，建立了实际的光路模型，进行了光线追迹，给出单模高斯光束以及考虑噪声情况下的仿真结果。分析结果表明，使用微反射镜阵列可以有效地实现不同输入下的激光光束整形，并且具有极大的灵活性，为光束整形提供了一种新的手段。

Application of micromirror array in beam shaping

In the application of laser, the technique of beam shaping was used to modulate the beam to expected intensity distribution. The development of micro electronic and mechanic system provided a solution. The beam shaping was realized by the using of micro mirror array. Based on the idea of randomization, an algorithm was proposed for the application,and the performance under different unit numbers and different noise levels was analyzed so as to present valuable reference in practical application. At the end, a practical optical system model was built and beam trace was performed, and the results under single-mode Gaussian beam and with-noise beam were given. The analysis on results show that beam shaping is achieved effectively using micromirror array under different inputs. And because of the independent addressing property of the micromirror array, the method has flexibility which can satisfy a variety of application requirement.