| 非对称双极脉冲磁控溅射制备Ti-Co-La-N纳米薄膜性能 |
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| 引用本文： | 李成明,陈良贤,刘政,黑立富,吕反修.非对称双极脉冲磁控溅射制备Ti-Co-La-N纳米薄膜性能[J].材料热处理学报,2010,31(9). |
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| 作者姓名： | 李成明 陈良贤 刘政 黑立富 吕反修 |
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| 作者单位： | 北京科技大学材料学科学与工程学院,北京,100083 |
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| 摘 要： | 利用非对称双极脉冲磁控溅射制备了不用Co-La掺杂量的Ti-Co-La-N纳米复合薄膜.分别用扫描电子显微镜、X射线衍射、纳米压痕仪、划痕仪以及摩擦磨损仪研究了薄膜的表面形貌、结合力、显微硬度和摩擦学性能.结果表明:复合薄膜主要有TiN相、Co2N相和LaN相组成;复合膜的纤维硬度达到14.61 GPa,低于TiN的显微硬度;复合薄膜的显微硬度和结合力都随着Co-La掺杂量的增加而降低;在高速钢基体上复合薄膜的摩擦系数达到了0.6.
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| 关 键 词： | 纳米复合 Co-La掺杂 |
Properties of Ti-Co-La-N nano-films deposited by asymmetric bipolar pulsed reactive magnetron sputtering |
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| LI Cheng-ming,CHEN Liang-xian,LIU Zheng,HEI Li-fu,LU Fan-xiu.Properties of Ti-Co-La-N nano-films deposited by asymmetric bipolar pulsed reactive magnetron sputtering[J].Transactions of Materials and Heat Treatment,2010,31(9). |
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| Authors: | LI Cheng-ming CHEN Liang-xian LIU Zheng HEI Li-fu LU Fan-xiu |
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| Abstract: | Ti-Co-La-N nano-composite films with different Co-La doping amount were deposited by the asymmetric bipolar pulsed reactive magnetron sputtering.The microstructure,morphology,adhesion,microhardness and tribological properties of the films were investigated by means of scanning electron microscopy (SEM),X-ray diffraction (XRD) ,nano-indentation,scratching test,friction and wear testing.The results show that phase composition of Ti-Co-La-N films are TiN,Co2 N and LaN.The microhardness of 14.61 GPa of Ti-Go-La-N film is lower than that of TiN.Furthermore,microhardness and adhesion of the composite film decline apparently as the increasing of Co/La doping amount.The friction coefficient is about 0.6 of Ti-Co-La-N nano-film on high-speed steel substrate. |
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| Keywords: | TiN |
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