基于光流技术的MEMS器件平面微运动测量

为测量MEMS谐振器周期运动过程中各时刻不同相位的运动特性及其动态参数,提出利用光学测量方法,设计基于机器微视觉的MEMS动态分析仪.其实现机理是基于频闪成像原理获得MEMS谐振器一个周期内所需相位的清晰运动图像,结合光流技术对MEMS谐振器的运动序列图像做二维运动估计,从而得到其动态特性参数,为MEMS器件的设计提供重要参考.具有非接触性、测量精度高的特点.实验结果表明,该系统的测量重复性达7.1nm,能够很好地描述微谐振器的动态特性.

Measurement Technique of In-plane Motion for MEMS Based on Optical Flow

In order to measure dynamic parameters of MEMS resonator in the course of cycle motion at different time and different phase, based on machine micro-vision, an MEMS motion analyzer (MMA) was designed using optical measurement method. The realization mechanism is based on stroboscopic imaging principle to obtain clear motion images of needed phases for MEMS resonator in one cycle. And optical flow technique is used to estimate the two-dimensional motion for sequential images of MEMS resonator. The dynamic characteristics of MEMS device are acquired, which can provide important reference for the MEMS design. The proposed method has the features of non-connect and high measurement precision. Experimental results indicate that the system mean standard deviation of measurement repeatability is 7.1nm. The dynamic characteristics of MEMS are described very well by the designed MMA and the measurement precision is very good.