基于LabVIEW制备硅基一维光子晶体的计算机驱动程序

在制备硅基一维光子晶体如多孔硅分布Bragg反射镜和多孔硅微腔的实验中，为实现电脑程序驱动的电化学腐蚀平台的精确控制，使制备的光手晶体高低折射率层的界面更平整和硅孔大小更加均匀，我们利用NI推出的虚拟仪器开发平台软件LabVIEW编写了一套制备硅基一维光子晶体的计算机驱动软件。实验结果发现，由该软件驱动Keithley2400数宇电源制备的PS—DBRs显示出了纳米级平整的界面和反射率高，阻止带宽的光学特性。

The design of LabVIEW driver for producing one-dimensional Si-based photonic crystals

During the process of producing one-dimensional photonic crystal, the pores inside the high and low refractive index layers consisting of one-dimensional photonic crystal such as porous silicon Bragg reflectors (PS-DBRs) and microcavities (PSMs) will be more homogeneous by the precise control of anodic etching of silicon driving by computer program, which leads to the flatter interfaces between the high and low refractive index layers. We make a set of computer-driven software for producing Si-based one-dimensional photonic crystal by using the software LabVIEW introduced by NI which is for the development of virtual machines. As an example, a PS-DBR is fabricated by using this set LabVIEW software and the nanometer-scale flat interfaces inside the one-dimensional Si-based photonic crystals are demonstrated, which leads to the broad stop -band of 160 nm with the high reflectivity of 99%.