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TiO2薄膜与玻璃基板横断截面的TEM及TEM—EDX分析
引用本文:俞心刚,杨荣兴.TiO2薄膜与玻璃基板横断截面的TEM及TEM—EDX分析[J].膜科学与技术,1999,19(3):57-59.
作者姓名:俞心刚  杨荣兴
作者单位:北京市自动化系统成套工程公司,桂林工学院,中国地质大学材料科学系,中国建筑材料科学研究院
摘    要:对玻璃基板上TiO2薄膜与基板横断截面进行了TEM形貌及TEM-EDX成分分析.结果表明,薄膜与基板结合致密,Na+从基板向TiO2薄膜的扩散为负扩散

关 键 词:二氧化钛  溶胶-凝胶  薄膜  扩散

TEM and TEM-EDX analyses of cross-section of TiO2 thin film and glass substrate
Yu Xingang.TEM and TEM-EDX analyses of cross-section of TiO2 thin film and glass substrate[J].Membrane Science and Technology,1999,19(3):57-59.
Authors:Yu Xingang
Abstract:TiO2 thin film was deposited on Na2O-CaO-SiO2 glass substrate by sol-gel process. TEM observation showed that the film was compactly joined to the substrate. TEM-DEX analyses of the film, film-substrate interface, and substrate revealed that the diffusion of Na from the substrate to the film is negative diffusion.
Keywords:titaniasol-gelthin filmdiffusion  
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