Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy |
| |
Authors: | Zhang P Wang H Y Li Y G Mao S F Ding Z J |
| |
Affiliation: | Hefei National Laboratory for Physical Sciences at Microscale, Department of Physics, University of Science and Technology of China, Hefei, Anhui, People's Republic of China. |
| |
Abstract: | Monte Carlo simulation methods for the study of electron beam interaction with solids have been mostly concerned with specimens of simple geometry. In this article, we propose a simulation algorithm for treating arbitrary complex structures in a real sample. The method is based on a finite element triangular mesh modeling of sample geometry and a space subdivision for accelerating simulation. Simulation of secondary electron image in scanning electron microscopy has been performed for gold particles on a carbon substrate. Comparison of the simulation result with an experiment image confirms that this method is effective to model complex morphology of a real sample. |
| |
Keywords: | secondary electron scanning electron microscopy images Monte Carlo arbitrary complex structures |
本文献已被 PubMed 等数据库收录! |