| 高频等离子法制取超细氮化钛反应动力学研究SCIEI |
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| 引用本文： | 朱联锡,邹四维.高频等离子法制取超细氮化钛反应动力学研究SCIEI[J].金属学报,1990,26(1):135-140. |
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| 作者姓名： | 朱联锡 邹四维 |
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| 作者单位： | 成都科技大学环境科学及工程系，成都科技大学 副教授成都(610065) |
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| 摘 要： | 本文研究了等离子法合成超细氮化钛反应动力学,建立了TiCl_4-NH_3-H_2-N_2系统在高频等离子反应器中气相合成超细TiN粉末的反应动力学模型,对影响反应速度的主要因素进行了分析,为控制TiN产品的质量及对等离子反应器的优化设计提供了理论依据。
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| 关 键 词： | 等离子法 氮化钛 反应动力学 粉末 TiN plasma kinetics |
| 收稿时间： | 1990-01-18 |
| 修稿时间： | 1990-01-18 |
KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA |
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| ZHU Lianxi,ZOU Siwei Chengdu University of Science and Technology.KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA[J].Acta Metallurgica Sinica,1990,26(1):135-140. |
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| Authors: | ZHU Lianxi ZOU Siwei Chengdu University of Science and Technology |
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| Affiliation: | ZHU Lianxi,ZOU Siwei Chengdu University of Science and Technology Department of Environmental Science and Engineering,Chengdu University of Science and Technology,Chengdu |
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| Abstract: | The reaction kinetics model for the synthesis of ultrafine TiN pow-der from vapour phase system TiCl_4-NH_3-H_2-N_2 in the high frequency plasma reac-tor was proposed as follows: (-r_A)=-1/v(dn_(TiCl_4)/dt)=0.852e~(-63.2/RT)P_(TiCl_4)The majority of factors influenced upon the reaction be were analysed, so as toprovide the theoretical basis for improving quality of TiN powder and for opti-mizing the design of plasma reactor. |
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| Keywords: | TiN plasma kinetics |
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