| 压阻式微加速度计动态特性与阻尼的关系研究 |
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| 引用本文： | 毛海央,熊继军,张文栋,徐栋,范波. 压阻式微加速度计动态特性与阻尼的关系研究[J]. 仪器仪表学报, 2007, 28(9): 1594-1599 |
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| 作者姓名： | 毛海央 熊继军 张文栋 徐栋 范波 |
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| 作者单位： | 中北大学电子测试技术国防重点实验室,太原,030051 |
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| 基金项目： | 国家自然科学基金;霍英东教育基金;教育部跨世纪优秀人才培养计划 |
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| 摘 要： | 采用微机械加工工艺制作的压阻式微加速度计在测试过程中经常出现动态特性欠佳甚至于结构损坏的现象，在压阻式微加速度计中，合理设计阻尼参数有助于改善传感器的动态特性。将压阻式微加速度计简化为二阶模型，定性分析了系统动态特性与阻尼之间的关系，研究了压阻式微加速度计结构中阻尼的设计和控制方法，仿真、比较了带不同阻尼参数传感器系统的动态特性，并通过实验验证了仿真分析的正确性。
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| 关 键 词： | 阻尼 压阻式微加速度计 二阶系统 动态特性 |
| 修稿时间： | 2006-10-01 |
Damping in piezoresistive micro accelerometer |
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| Mao Haiyang,Xiong Jijun,Zhang Wendong,Xu Dong,Fan Bo. Damping in piezoresistive micro accelerometer[J]. Chinese Journal of Scientific Instrument, 2007, 28(9): 1594-1599 |
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| Authors: | Mao Haiyang Xiong Jijun Zhang Wendong Xu Dong Fan Bo |
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| Affiliation: | Key Laboratory of the Electronic Measurement Technology of the National Defense, North University of China, Taiyuan 030051, China |
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| Abstract: | The dynamic characteristics of the piezoresistive micro accelerometers fabricated using micromachining techniques are not as good as expected, some of the accelerometers may even be damaged in the measurement procedure. If a proper damping parameter is set for an accelerometer system, its dynamic characteristics can be improved. The piezoresistive micro accelerometer is simplified as a second-order system; the relationship between its dynamic characteristic and damping is analyzed qualitatively. The design and control method of damping in piezoresistive micro accelerometer structure is studied; accelerometers with different damping parameters are simulated and their dynamic characteristics are compared with each other. Finally, experimental results prove the correctness of the simulation results. |
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| Keywords: | damping piezoresistive micro accelerometer second-order system dynamic characteristic |
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