| FED制作工艺研究 |
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| 引用本文： | 皇甫鲁江,朱长纯.FED制作工艺研究[J].光电子技术,1996,16(2):104-112. |
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| 作者姓名： | 皇甫鲁江 朱长纯 |
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| 作者单位： | 西安交通大学真空微电子与微电子机械研究所!710049 |
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| 摘 要： | 本文介绍了我们开发的ＦＥＤ工艺，包括；硅锥场致发射阵列的制作，栅极制作，阳极支柱的制作和平板透明真空封装，对工艺中的难点及对策作了详细描述。利用上述工艺，已经制成了平板数码管，其栅阴特性理想，阳阴之间也能测得明显的场致发射特性产伴有荧光激发。
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| 关 键 词： | 场致发射 平板显示器 FED 制作工艺 |
Research on the Processing of Vacuum Microelectronic Flat-Panel Displays |
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| Huangfu Lujiang,Zhu Changchun,Huai Yongjin,Song Lijian.Research on the Processing of Vacuum Microelectronic Flat-Panel Displays[J].Optoelectronic Technology,1996,16(2):104-112. |
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| Authors: | Huangfu Lujiang Zhu Changchun Huai Yongjin Song Lijian |
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| Abstract: | The piocessing developed for vacuum microelectronic flat-panel nixie were introduced, including the fabrication of the field emission arrays,the gates,anode pillars and the transparent flat-panel vacuum packages. The difficulties in the processing and the method to overcome them were described in detail. The flat-panel nixies with ideal I-V characteristics between gates and cathodes have been fabricated with the processing. Field emission characteristic was also detected between cathodes and anodes, and the fluorescence light was found.Some problems in maintaining the vacuum in package,getting gate-controlling function and uniform light emission were analyzed. |
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| Keywords: | field emission flat-panel displays |
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