| 高效平面全息衍射光栅的获取方法 |
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| 引用本文： | 赵博,齐向东.高效平面全息衍射光栅的获取方法[J].光学精密工程,2001,9(2):109-114. |
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| 作者姓名： | 赵博 齐向东 |
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| 作者单位： | 1. 北京大学遥感与地理信息系统研究所,
2. 中国科学院长春光学精密机械与物理研究所, |
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| 摘 要： | 从全息衍射光栅的制作原理出发,介绍了全息光栅的主要制作方法,并与刻划光栅对比分析了全息衍射光栅的诸多优点。通过利用光栅设计的耦合波理论对全息衍射光栅槽型、槽深及槽间距等进行了优化设计,同时利用离子束刻蚀技术获得了高效率全息光栅。文中全面分析了制作高效率平面全息光栅的各项关键技术。
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| 关 键 词： | 全息光栅 离子刻蚀 衍射效率 |
| 文章编号： | 1004-924X(2001)02-0109-06 |
| 收稿时间： | 2000-08-21 |
| 修稿时间： | 2000年8月21日 |
Manufacturing of high efficient holographic diffraction gratings |
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| ZHAO Bo,QI Xiang-dong.Manufacturing of high efficient holographic diffraction gratings[J].Optics and Precision Engineering,2001,9(2):109-114. |
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| Authors: | ZHAO Bo QI Xiang-dong |
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| Affiliation: | 1. The Institute of Remote Sensing and Geographical Information System, Peking University, Beijing, 100871, China;2. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China |
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| Abstract: | WT5BZ]In light of the manufacturing principles of holographic diffraction gratings, the paper presents a main method of manufacturing the holographic gratings. In comparison with ruling gratings, the holographic diffraction gratings have many advantages. Using the coupling wave theory and ion etching, the design and efficiency of the gratings have been optimized and improved, respectively. The paper also gives various key technologies in manufacturing high efficient holographic diffraction gratings in detail. WT5HZ] |
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| Keywords: | holographic gratings ion etching diffraction efficiency |
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