| 金刚石薄膜质量的拉曼光谱与红外光谱判定 |
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| 引用本文： | 张兵临 Phil.,HM.金刚石薄膜质量的拉曼光谱与红外光谱判定[J].光散射学报,1996,8(2):93-96. |
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| 作者姓名： | 张兵临 Phil. HM |
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| 作者单位： | 郑州大学物理系及河南省基础及应用科学研究所 |
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| 摘 要： | 根据ＤｉＤｏｍｅｎｉｃｏ公式并采用计算机模拟计算了金刚石薄膜中的ｓｐ２／ｓｐ３键价比，计算中不仅考虑了ｓｐ３相及ｓｐ２相拉曼线１３３２ｃｍ－１，１５８０ｃｍ－１，同时考虑了“Ｄ”线１３５５ｃｍ－１存在，这一计算给出了金刚石薄膜质量的定量评估方法。当金刚石薄膜质量较高时，由于仪器灵敏度限制，其拉曼光谱中显示不出ｓｐ２相宽带结构情况下，无法采用拉曼光谱判定薄膜质量。在此情况下，本文提出了藉助于红外光谱计算有效电子数ｎｅｆｆ从而相对评估金刚石薄膜质量的判断技术
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| 关 键 词： | 金刚石薄膜 拉曼光谱 红外透射光谱 有效电子数 |
Assessment of the Quality of Diamond Films by Using Raman and Infrared Transmission Spectroscopy |
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| Zhang Binglin,H.M.Phillips.Assessment of the Quality of Diamond Films by Using Raman and Infrared Transmission Spectroscopy[J].Chinese Journal of Light Scattering,1996,8(2):93-96. |
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| Authors: | Zhang Binglin HMPhillips |
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| Abstract: | sp 2/sp 3 bonding ratio of diamond thin film has been calculated by Using the DiDomenico formula and computer fitting. Three of the Raman lines at 1332cm -1 for the sp 3 phase,1580cm -1 for the sp 2 phase,and the “D” line at 1355cm -1 are considered in the calculation. This method can give a quantitative assessment of the quality of the films. However this quantitative assessment is useless when the broad band of sp 2 phase cannot be resolved in the Raman spectrum because of in limitation sensitivity. In this case, a diagnostic technique utilizing infrared transmission spectroscopy to calculate the effective number of electrons per atom in diamond thin film is presented. |
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| Keywords: | diamond thin film Raman spectroscopy infrared transmission spectroscopy effective number of electrons |
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