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基于介质上电润湿的钳制式液体变焦透镜
引用本文:康明,欧阳帆,吴建刚,孙凯歌,岳瑞峰,刘理天.基于介质上电润湿的钳制式液体变焦透镜[J].传感技术学报,2008,21(4):652-655.
作者姓名:康明  欧阳帆  吴建刚  孙凯歌  岳瑞峰  刘理天
作者单位:清华大学微电子学研究所,北京,100084
摘    要:提出了一种基于介质上电润湿(EWOD)的新型液体变焦透镜结构并研制出样机。它由一个依次覆盖有氧化铟锡(ITO)透明导电薄膜及疏水介质膜的玻璃下极板、悬浮于其上方的一个中空金属环、以及作为透镜的去离子水滴组成。通过改变施加于ITO电极与金属环之间的电压大小,就能调控水滴的曲率,从而实现对透镜焦距的调节。实验结果表明,在0~40V电压范围内,该透镜样机的焦距调节范围为8.51mm至55.9mm,可实现对2.0cm至无穷远处物体的聚焦。

关 键 词:介质上电润湿  液体透镜  表面张力  变焦
文章编号:1004-1699(2008)04-0652-04
修稿时间:2007年9月30日

Meniscus Pinned Variable-focus Liquid Lens Based on Electrowetting-on-dielectric
KANG Ming,OUYANG Fan,WU Jian-gang,SUN Kai-ge,YUE Rui-feng,LIU Li-tian.Meniscus Pinned Variable-focus Liquid Lens Based on Electrowetting-on-dielectric[J].Journal of Transduction Technology,2008,21(4):652-655.
Authors:KANG Ming  OUYANG Fan  WU Jian-gang  SUN Kai-ge  YUE Rui-feng  LIU Li-tian
Affiliation:Institute of Microelectronics, Tsinghua University,
Abstract:A novel configuration of variable-focus liquid lens based on electrowetting-on-dielectric phenomenon is presented,which consists of a glass slide growing a conductive indium tin oxide(ITO)film and a hydrophobic dielectric film respectively,a hollow metal ring suspended right above the slide,and a droplet of deionized water for lens.By changing the applied voltage between the metal ring and the ITO control electrode,the curvature of the droplet meniscus can be reversibly adjusted,thus tuning the focal length of the lens.A prototype of the lens was tested.The experimental results show that in the range of 0~40 V power supplies,the focal length can be tuned from 8.51 mm to 55.9 mm,and the liquid lens is able to focus on objects from 2 centimeters up to infinity away with good imaging quality.
Keywords:electrowetting-on-dielectric  liquid lens  surface tension  variable focus
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