可调谐半导体激光吸收传感器的温度测量验证

开发了一种可调谐半导体激光吸收传感器，用于测量气体的温度，应用扫描波长吸收谱和固定波长调制谱探测水蒸气在7 454.4 cm-1和7 185.6 cm-1附近的两条吸收谱线。传感器可实现绝对温度测量，固定波长调制谱更可实现10 kHz以上的测量带宽。传感器的性能和精度在已知温度和压力的静室中进行测量验证，在600~1 000 K的设定温度范围，两种方法的测量误差（RMS）都小于2%。表明可调谐半导体激光吸收光谱（TDLAS）传感器对于均匀的流场具有快速和精确的温度测量能力。

Validation of temperature measurement for a tunable diode laser absorption sensor

A tunable diode laser absorption sensor was developed to measure gas temperature, which exploited scanned-wavelength direct absorption spectroscopy and fixed-wavelength modulation spectroscopy with second harmonic detection on two water vapour spectral features near 7 454.4 cm-1 and 7 185.6 cm-1. The sensor was capable of making absolute measurement and could reach 10 kHz output bandwidth using fixed-wavelength modulation spectroscopy. Its performance and accuracy were validated and demonstrated in a static cell with known temperature and pressure. The measured temperature using two techniques agree to within 2% RMS of thermocouple reading for temperature from 600 to 1 000 K, which indicates the sensor is capable of making rapid and highly accurate temperature measurement for uniform flow.