自适应遗传退火算法在薄膜椭偏测量中的应用

将自适应遗传模拟退火混合算法应用于薄膜椭偏测量的反演问题中.由于模拟退火算法的基本思想是跳出局部最优解而得到全局最优解,因此将模拟退火思想引入到遗传算法,遗传算法和模拟退火算法相结合,组建自适应遗传模拟退火算法,从而综合了全局优化和局部搜索的特点,并通过模拟计算,验证了此方法在薄膜椭偏测量问题中的可行性及有效性,为解决...

Application of adaptive genetic simulated annealing algorithm in ellipsometric measurement of thin films

The essence of simulated annealing algorithm is getting away from the local optimum and converging to the global optimum,so the method is introduced into genetic algorithms.Combining simulated annealing and genetic algorithm together,a new algorithm called adaptive genetic simulated annealing algorithm is formed and is introduced in order to solve inverse problem related to ellipsometric measurement of thin films.The hybrid algorithm combines two powers:global optimization and local search.What is more,in order to check the feasibility and efficiency of the algorithm in ellipsometric measurement of thin films,numerical simulation is done in this paper.The results obtained may be a good example to demonstrate the feasibility and efficiency of the approach to solve more complex inverse problems in ellipsometry.