| Pd掺杂ZnO纳米线的乙醇气敏特性研究 |
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| 引用本文： | 邓霄,高翻琴孙永娇.Pd掺杂ZnO纳米线的乙醇气敏特性研究[J].传感器与微系统,2014(4):24-26,30. |
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| 作者姓名： | 邓霄 高翻琴孙永娇 |
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| 作者单位： | [1]太原理工大学信息工程学院微纳系统研究中心,山西太原030024 [2]太原理工大学物理与光电工程学院,山西太原030024 |
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| 基金项目： | 国家自然科学基金资助项目（51205273）;山西省青年科学基金资助项目（2013021017-2）;山西省高等学校科技创新基金资助项目（20120007）;太原理工大学研究生创新基金资助项目（2013A005） |
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| 摘 要： | 研究以贵金属Pd作为掺杂剂的ZnO纳米线敏感元件的乙醇气敏性能。采用水热法在叉指电极上直接制备出具有c轴取向的ZnO多晶纳米线。用SEM,XRD和EDS分析手段观测了材料的微观结构,并对其乙醇气敏性能进行了测试。实验结果表明:对于体积分数为200×10-6的乙醇气体,Pd掺杂的ZnO纳米线在灵敏度(8.17)、工作温度(325℃)和响应恢复时间(15,8s)上优于纯的ZnO纳米线。最后,对Pd掺杂的气敏机理进行了讨论。
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| 关 键 词： | ZnO纳米线 水热法 Pd掺杂 气体传感器 乙醇 |
Research on ethanol gas sensitive properties of Pd-doped ZnO nanowires |
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| DENG Xiao,GAO Fan-qin,SUN Yong-jiao.Research on ethanol gas sensitive properties of Pd-doped ZnO nanowires[J].Transducer and Microsystem Technology,2014(4):24-26,30. |
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| Authors: | DENG Xiao GAO Fan-qin SUN Yong-jiao |
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| Affiliation: | 1.Micro-Nano System Research Center, College of Information Engineering, Taiyuan University of Technology, Taiyuan 030024, China;College of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China;) |
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| Abstract: | The ethanol gas sensitive element properties of ZnO nanowires doped with noble metal of Pd are investigated.The hydrothermal method is used to prepare polycrystalline ZnO nanowires with c axis orientation on interdigital electrodes.The microstructure of nanowires is analyzed by SEM,XRD,and EDS method,meanwhile,ethanol gas sensitive properties of sensors are also investigated.Experimental results indicate that Pd-doped ZnO（Pd-ZnO） nanowires is prior to pure ZnO nanowires on sensitivity（8.17）,operating temperature（325 ℃）,and response and recovery time（15,8 s） for ethanol gas volume fraction 200 ×10-6.At last,gas sensitive mechanism of Pd-doped is discussed. |
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| Keywords: | ZnO nanowires hydrothermal method Pd-doped gas sensor ethanol |
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