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高速铌酸锂电光调制器研究进展
引用本文:陆锦东,匡作鑫,陈伟,余华.高速铌酸锂电光调制器研究进展[J].半导体光电,2022,43(6):1029-1039.
作者姓名:陆锦东  匡作鑫  陈伟  余华
作者单位:重庆大学 光电工程学院 重庆大学光电技术及系统教育部重点实验室, 重庆 400044
基金项目:国家自然科学基金项目(61874105);重庆市技术创新与应用发展专项重点项目(cstc2021jscx-gksbX0045).*通信作者:余华E-mail:yuhua@cqu.edu.cn
摘    要:薄膜铌酸锂调制器因其小尺寸、高带宽、低半波电压等优点,成为近年来业内关注的热点。文章梳理了铌酸锂电光调制器的波导结构、电极结构及偏置点控制技术三个方面的相关研究进展,分析了平面掩埋、脊型、光子晶体等三种不同结构波导的调制器性能,讨论了铌酸锂调制器集总和行波两种电极结构的特点及其设计考量因素,对比了电光调制器偏置点控制中功率法和导频法的优缺点及其相关研究成果。在此基础上,进一步分析了为实现更小体积与更高带宽铌酸锂调制器所需的关键技术以及未来的研究方向。

关 键 词:铌酸锂    电光调制器    光子晶体波导    行波电极    偏置点控制
收稿时间:2022/12/8 0:00:00

Research Progress of High-speed Lithium Niobate Electro-optic Modulator
LU Jindong,KUANG Zuoxin,CHEN Wei,YU Hua.Research Progress of High-speed Lithium Niobate Electro-optic Modulator[J].Semiconductor Optoelectronics,2022,43(6):1029-1039.
Authors:LU Jindong  KUANG Zuoxin  CHEN Wei  YU Hua
Affiliation:College of Optoelectronic Engineering, Chongqing University Key Laboratory of Optoelectronic Technology & System, Ministry of Education, Chongqing University, Chongqing 400044, CHN
Abstract:Thin film LiNbO3 modulator has become a hot spot in the industry in recent years because of its small size, high bandwidth, low half wave voltage and other advantages. In this paper, the research progress on waveguide structure, electrode structure and bias point control technology of LiNbO3 modulator were reviewed. The performance of three different waveguide structures, including planar buried waveguide, ridge waveguide and photonic crystal waveguide, were analyzed. The characteristics and design considerations of the lumped and traveling wave electrode structures of LiNbO3 modulator were discussed. The advantages and disadvantages of the power method and the pilot method in the bias point control of electro-optic modulator were compared, as well as the related research results. Based on this, the key technologies and future research directions for realizing the LiNbO3 modulator with smaller volume and higher bandwidth were further analyzed.
Keywords:LiNbO3  electro-optic modulator  photonic crystal waveguide  traveling wave electrode  bias point control
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