| 基于喇曼-奈斯衍射的微光机电加速度计理论分析和原理验证 |
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| 引用本文： | 张祖伟,温志渝,胡晶.基于喇曼-奈斯衍射的微光机电加速度计理论分析和原理验证[J].半导体学报,2012,33(4):044005-6. |
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| 作者姓名： | 张祖伟 温志渝 胡晶 |
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| 作者单位： | 重庆大学微系统研究中心,重庆大学微系统研究中心,重庆大学微系统研究中心 |
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| 摘 要： | 本文设计并模拟了了一种新型的基于喇曼-奈斯衍射的微光机电（MOEMS）加速度计。该加速度计将通过MEMS技术制造，并具有与已见报导的MOEMS加速度计完全不同的敏感原理。本文详细讨论了该新型加速度计的基础理论与原理；建立了弯曲板波延迟线振荡器的3D有限元模型，进行了谐响应分析和瞬态分析，得到器件工作频率在40MHz左右；最后建立了该微型加速度计的宏模型，对该器件的可行性进行了论证。该新型加速度计具有灵敏度高、抗辐射等优点，具有很大的应用前景。
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| 关 键 词： | 微光机电系统 加速度计 衍射理论 概念演示 拉曼 微机电系统技术 模拟设备 三维有限元 |
| 收稿时间： | 9/22/2011 3:54:35 PM |
Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction |
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| Zhang Zuwei,Wen Zhiyu and Hu Jing.Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J].Chinese Journal of Semiconductors,2012,33(4):044005-6. |
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| Authors: | Zhang Zuwei Wen Zhiyu and Hu Jing |
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| Affiliation: | Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China; National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China;Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China; National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China;Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China; National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China |
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| Abstract: | The design and simulation of a novel microoptoelectromechanical system (MOEMS) accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fundamental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications. |
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| Keywords: | accelerometer MOEMS Raman-Nath diffraction FPW delay line oscillator |
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