自聚焦共焦探测系统轴向分辨率的影响因素

从微小内尺度测量角度出发，研究了针孔尺寸、探测器位置、透镜的数值孔径、放大倍率和杂散光等对自聚焦共焦式探测系统轴向分辨率的影响。结果表明，为提高系统的轴向分辨率，需将有效针孔尺寸控制在≤2.5；探测器需配以精密微调整装置以实现横向精确定位；选用差动共焦光路及大数值孔径和大放大倍率的自聚焦透镜，同时，偏振光路的使用将有效的提高系统的信噪比。

Effects of Various Factors on Axial Resolution in an Optical 3D Measurements System with a Confocal Scanning Microscopy

For small internal measurement requirement,effects of some parameter in the system,such as the detector pinhole size,the detector position,the numerical aperture and the amplification of the lens used and stray light,on the axial resolution were analysed.It is pointed that the effective detector pinhole size should less than 2.5,the precision micro displacement system should be used to make detector accurately fix position,the property of the axial deflection can be used to make differential confocal scanning microscopy,the large numerical aperture and the large amplification of the lens used will help to increase the axial resolution of the system,and the signal to noise ratio of the system can be improved by using polarized light.