| 基于MEMS技术的SU-8仿昆虫微扑翼飞行器设计及制作 |
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| 引用本文： | 迟鹏程,张卫平,陈文元,李洪谊,孟坤,崔峰,刘武,吴校生.基于MEMS技术的SU-8仿昆虫微扑翼飞行器设计及制作[J].机器人,2011,33(3):366-370. |
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| 作者姓名： | 迟鹏程 张卫平 陈文元 李洪谊 孟坤 崔峰 刘武 吴校生 |
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| 作者单位： | 1. 上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海,200030
2. 中国科学院沈阳自动化研究所机器人学国家重点实验室,辽宁,沈阳,110016 |
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| 基金项目： | 国家863计划资助项目(2009AA04Z203); 机器人学国家重点实验室开放基金资助项目(R20200904); 上海交通大学SMC基金资助项目(T241460622) |
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| 摘 要： | 为研制一种轻质仿昆虫微扑翼飞行器,提出了采用微机电系统(MEMS)领域的SU-8光刻胶作为结构材料的制作方案.基于仿生学原理和微机电系统加工技术,设计微扑翼飞行器结构及MEMS 工艺方法.研究结果表明,该种结构设计及制作方案满足设计要求,为仿昆虫微扑翼飞行器的研制提供了一种很好的途径.
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| 关 键 词： | 微扑翼飞行器 SU-8 MEMS 仿生机器人 |
Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology |
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| CHI Pengcheng,ZHANG Weiping,CHEN Wenyuan,LI Hongyi,MENG Kun,CUI Feng,LIU Wu,WU Xiaosheng.Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology[J].Robot,2011,33(3):366-370. |
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| Authors: | CHI Pengcheng ZHANG Weiping CHEN Wenyuan LI Hongyi MENG Kun CUI Feng LIU Wu WU Xiaosheng |
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| Affiliation: | CHI Pengcheng~1,ZHANG Weiping~1,CHEN Wenyuan~1,LI Hongyi~2,MENG Kun~1,CUI Feng~1,LIU Wu~1,WU Xiaosheng~1 (1.Key Laboratory for Thin Film and Microfabrication of Ministry of Education,National Key Laboratory of Micro/Nano Fabrication Technology,Research Institute of Nano/Micro Technology,Shanghai Jiao Tong University,Shanghai 200030,China,2.The State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China) |
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| Abstract: | To develop a light biomimetic flapping-wing micro air vehicle,SU-8 photoresist in micro-electromechanical system(MEMS)field is used as its structural materials.Based on the bionics principle and MEMS technology,the structure and MEMS fabrication process are designed.The results show that this kind of structural design and production solution meet design requirements,and provide a good way for design and fabrication of flapping-wing micro air vehicle. |
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| Keywords: | flapping-wing micro air vehicle SU-8 MEMS(micro-electromechanical system) bio-robot |
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