Deposition of thin refractory MIS structures on InP |
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Authors: | A Christou W T Anderson |
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Affiliation: | (1) Naval Research Laboratory, 20375 Washington, D. C. |
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Abstract: | In the present investigation, we report on significant increases in the refractory-InP Schottky barrier by process modification of the metal-semiconductor interface. Refractory-InP MIS structures were investigated as pos-sible gate metallizations. These structures consisted of Ta/Ta2}O5}/InP and TiW/TiO2} /InP. A thin layer of Ta (100å) was electron beam vapor aeposited followed by the in situ formation of Ta2}O5} at 300?C and an oxygen overpressure. The remainder of the Ta film was deposited at 90?C substrate temperature. The TiW/TiO2} system was formed by sputter deposition of Ti (100A?), in situ oxidation to form TiO2} followed by deposition of TiW (88 wt % W, 12 wt % Ti). Effective barrier height for the TiW/TiO /InP structure was measured to be 0.65 eV and for the Ta/Ta2}O2} /InP, 0.5 eV. Leakage current at-5V was less than 3 A/cm2} for both refractory-InP MIS structures. The TiW/TiO2} /InP structure was stable up to 400-450°C, while the Ta/Ta2 O5/InP system degraded to 0.2 eV at 300-350?C. |
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Keywords: | Indium Phosphide Schottky Barriers MIS Structures Thin Films Metallizations |
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