Thermal Resonance at the Microscale in AC Scanning Thermal Microscopy with a Thermal-Resistive Probe

Investigation of the thermal-resistive probe response in an AC scanning thermal microscope (SThM) as a function of the distance probe–material surface under ambient conditions and the current excitation frequency is presented. The analysis of temperature experimental results points out a phenomenon which can be interpreted as a thermal wave resonance. The modeling of the thermal response with the finite element method considering the surrounding medium as a thermally conducting medium tends to confirm this. This phenomenon is independent of the sample nature and is related to the thermal diffusion length of the air medium between the probe and the sample. An equivalent resonance factor is defined: it shows a linear dependence with the characteristic distance for which the thermal resonance phenomenon is an extremum. The system—probe/sample surface—behaves as a resonant cavity at the microscale. This configuration is not specific to a SThM and can occur within electronic devices.