| 波导薄膜厚度测量原理的理论分析 |
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| 引用本文： | 赵毅红,陈荣发.波导薄膜厚度测量原理的理论分析[J].真空,2005,42(1):25-27. |
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| 作者姓名： | 赵毅红 陈荣发 |
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| 作者单位： | 扬州大学机械工程学院,江苏,扬州,225009 |
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| 基金项目： | 扬州大学校科研和教改项目，江苏省教育厅科研项目 |
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| 摘 要： | 运用电磁场理论对金属波导膜厚测量的原理进行了详细分析,并且研制了一台膜厚测量仪,理论和实践表明:可以通过测量复合金属波导膜系励磁电流的脉冲波形来控制薄膜的生长厚度.
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| 关 键 词： | 膜厚测量 波导薄膜 电磁场理论 励磁电流 |
| 文章编号： | 1002-0322(2005)01-0025-03 |
Analysis of the principle of thickness measurement of waveguide iris |
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| ZHAO Yi-hong,Chen Rong-fa.Analysis of the principle of thickness measurement of waveguide iris[J].Vacuum,2005,42(1):25-27. |
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| Authors: | ZHAO Yi-hong Chen Rong-fa |
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| Abstract: | Analyzes in detail the principle of thickness measurement of metallic waveguide iris by means of the electromagnetic field theory. A conclusion is drawn that the thickness of composite metallic waveguide iris can be controlled by measuring its pulse waveform of excting current. |
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| Keywords: | thickness measurement waveguide iris electromagnetic field theory exciting current |
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