| MEMS湿度传感器信号采集与数字化处理研究 |
| |
| 引用本文： | 王康,秦明.MEMS湿度传感器信号采集与数字化处理研究[J].电子工程师,2008,34(11):53-55. |
| |
| 作者姓名： | 王康 秦明 |
| |
| 作者单位： | 东南大学MEMS教育部重点实验室,江苏省,南京市,210096 |
| |
| 基金项目： | 国家863基金资助项目
|
| |
| 摘 要： | MEMS（微电子机械系统）湿度传感器是利用标准的CMOS技术加上MEMS的后处理技术制造，以其体积小、响应快等优点受到越来越多的重视，介绍了本实验室研制的MEMS压阻式湿度传感器的测试原理、硬件电路的设计和传输函数模型的建立，以及软件设计和封装设计，最后给出了样机的测试结果。
|
| 关 键 词： | MEMS 压阻式湿度传感器 信号采集 传输函数 封装设计 |
Study on Signal Acquisition and Digital Processing of Data from MEMS Humidity Sensor |
| |
| WANG Kang,QIN Ming.Study on Signal Acquisition and Digital Processing of Data from MEMS Humidity Sensor[J].Electronic Engineer,2008,34(11):53-55. |
| |
| Authors: | WANG Kang QIN Ming |
| |
| Affiliation: | (Key Laboratory of MEMS of Educational Ministry, Southeast University, Nanjing 210096, China) |
| |
| Abstract: | MEMS （Micro Electro Mechanical systems） humidity sensor manufactured by standard CMOS technology and MEMS post processing technology is becoming more and more popular because of having such advantages as small size and fast response time. This paper describes the theory of MEMS piezoresistive humidity sensor developed by our lab, introduces the design of hardware , software, and packaging, establishment of the model of transmission function. Finally we present the test result of the packaged sensor. |
| |
| Keywords: | MEMS |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
