| 摘 要： | A new method of structuralcontrol of low refraction index silica thin films is reported. Based on TEOS system andsol-gel process, together with organic dopant and silane coupling agent, themicrostructure of SiO2 particles in the sol is exactly controlled. Then silicathin films with 1.15～1.18 of refractive index are obtained by use of dip-coating. Thefilms are characterized by ellipsometer, spectrophotometer,SEM and TEM, respectively. Theexperimental results show that adjusting pH value of the sol can effectively control andkeep the microstructure of SiO2 sol, and the doping silane coupling agent makesparticles of SiO2 sol grow up.
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