| 双纳米硅p层优化非晶硅太阳能电池 |
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| 引用本文： | 刘石勇,曾湘波,彭文博,姚文杰,谢小兵,杨萍,王超,王占国.双纳米硅p层优化非晶硅太阳能电池[J].材料工程,2011(8):5-7,13. |
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| 作者姓名： | 刘石勇 曾湘波 彭文博 姚文杰 谢小兵 杨萍 王超 王占国 |
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| 作者单位： | 中国科学院半导体研究所材料科学重点实验室,北京,100083 |
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| 基金项目： | 国家重点基础研究发展计划资助项目，国家自然科学基金资助项目，中国科学院知识创新工程重要方向资助项目 |
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| 摘 要： | 采用等离子体增强化学气相沉积(Plasma Enhanced Chemical Vapor Deposition,PECVD)技术在高功率密度、高反应气压和低衬底温度下制备出不同氢稀释比RH的硅薄膜.高分辨透射电镜(High-Resolution Transmission Electron Microscopy,HRT...
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| 关 键 词： | 纳米硅 氢稀释比 光学带隙 |
Optimization of Double Nanocrystalline Silicon p-layers for Amorphous Silicon Solar Cells |
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| LIU Shi-yong,ZENG Xiang-bo,PENG Wen-bo,YAO Wen-jie,XIE Xiao-bing,YANG Ping,WANG Chao,WANG Zhan-guo.Optimization of Double Nanocrystalline Silicon p-layers for Amorphous Silicon Solar Cells[J].Journal of Materials Engineering,2011(8):5-7,13. |
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| Authors: | LIU Shi-yong ZENG Xiang-bo PENG Wen-bo YAO Wen-jie XIE Xiao-bing YANG Ping WANG Chao WANG Zhan-guo |
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| Affiliation: | (Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China) |
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| Abstract: | The plasma enhanced chemical vapor deposition(PECVD) system was used for fabricating the silicon films with different hydrogen dilution ratio(RH) under the high power density,high pressure and low substrate temperature.High-resolution transmission electron microscopy(HRTEM) and Raman spectroscopy indicated that the thin films were nanocrystalline silicon(nc-Si) films which contained nanocrystallites with grain size around 3-5nm.The effects of the RH on the optical band gaps of the nc-Si thin films were studied.The results showed that the optical band gaps of the nc-Si thin films increased with the increased in the RH.An double nc-Si p-layers structure was developed to improve the i/p interface in hydrogenated amorphous silicon(a-Si∶H) solar cells.The efficiency of the double nc-Si p-layers cell was improved by 17% compared its counterpart of the single nc-Si p-layer cell. |
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| Keywords: | nanocrystalline silicon hydrogen dilution ratio optical band gap |
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