| 原子力显微镜力传感器的设计 |
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| 引用本文： | 薛实福,刘永生.原子力显微镜力传感器的设计[J].中国机械工程,1995,6(2):22-25. |
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| 作者姓名： | 薛实福 刘永生 |
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| 作者单位： | 清华大学精密仪器与机械学系 |
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| 摘 要： | 着重介绍原子力显微镜力传感器的要求和力传感器设计的有关问题，并提供一种用图表设计结构尺寸的方法。
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| 关 键 词： | 原子力显微镜 力传感器 悬壁梁探针 设计 显微镜 |
Design of Force Sensors for Atomic Force Microscope |
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| Xue Shifu, Liu Yongsheng, Li Qingxiang et al.Design of Force Sensors for Atomic Force Microscope[J].China Mechanical Engineering,1995,6(2):22-25. |
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| Authors: | Xue Shifu Liu Yongsheng Li Qingxiang |
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| Affiliation: | Xue Shifu; Liu Yongsheng; Li Qingxiang et al |
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| Abstract: | In Atomic Force Microscope, force sensorcantilever stylus,is a crucial component, since it decide the lateral resolution of an AFM that can be achieved. In this paper,the requirements of microfabrated force sensors are described,and a method to design force sensors is presented. |
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| Keywords: | s: atomic force mircoscope force sensor cantilever stylus design |
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