| TiO2薄膜型气体传感器研究进展 |
| |
| 引用本文： | 姜涛,吴一平.TiO2薄膜型气体传感器研究进展[J].材料工程,1996(5):24-26. |
| |
| 作者姓名： | 姜涛 吴一平 |
| |
| 作者单位： | 华中理工大学 |
| |
| 摘 要： | 综述了国内外ＴｉＯ２气体传感器的发展状况，工作原理以及不同类型的ＴｉＯ２传感器。徽电子加工技术和薄膜技术的引入，为实现气体传感器小型化、集成化、高灵敏度化提供了重要手段。
|
| 关 键 词： | 气体 传感器 薄膜 掺杂 二氧化钛 |
Study of the Ti0_2 Film Gas Sensors |
| |
| Jiang Tao Wu Yiping Chen Jianguo Hu Yifan Sun Peizhen.Study of the Ti0_2 Film Gas Sensors[J].Journal of Materials Engineering,1996(5):24-26. |
| |
| Authors: | Jiang Tao Wu Yiping Chen Jianguo Hu Yifan Sun Peizhen |
| |
| Affiliation: | Huazhong University of Technology |
| |
| Abstract: | The development of titanium dioxide gas sensors and the principle of working and the different types of titanium dioxide gas sensors have been commented in this paper. The miniature and as-semblage and high sensitivity of gas sensors have been provided many important methods by the introduc-tion of microelectricity and film technology . |
| |
| Keywords: | titanium dioxide gas sensor film doping |
| 本文献已被 CNKI 维普 等数据库收录！ |
