| Si含量对多元等离子体浸没离子注入与沉积技术制备TiAlSiN涂层微结构和机械性能的影响(英文) |
| |
| 引用本文： | 解志文,王小峰,黄磊,陆洋,闫久春.Si含量对多元等离子体浸没离子注入与沉积技术制备TiAlSiN涂层微结构和机械性能的影响(英文)[J].中国有色金属学会会刊,2011(Z2). |
| |
| 作者姓名： | 解志文 王小峰 黄磊 陆洋 闫久春 |
| |
| 作者单位： | 哈尔滨工业大学先进焊接与连接国家重点实验室; |
| |
| 基金项目： | Project(10875033)supported by the National Natural Science Foundation of China |
| |
| 摘 要： | 采用多元等离子体浸没离子注入与沉积制备TiAlSiN纳米复合涂层,利用EDX,XRD,SEM,XPS,纳米探针和划痕试验对涂层成分组成、微结构和机械性能进行测试分析。XRD测试表明,TiAlSiN涂层具有较强的TiN(200)择优取向。XPS测试表明,TiAlSiN涂层中也含有AlN、Si3N4、Al2O3和Ti2O3。与制备的TiN涂层相比,当涂层中的Si含量为0.9%时,TiAlSiN涂层表现出较高的硬度,达32GPa,但涂层的断裂韧性和结合强度较低;当涂层中的Si含量增加至6.0%时,TiAlSiN涂层具有超高的硬度57GPa,并表现出较好的断裂韧性和结合强度。
|
| 关 键 词： | TiAlSiN 离子注入 沉积 结构 纳米硬度 |
Influence of Si content on structure and mechanical properties of TiAlSiN coatings deposited by multi-plasma immersion ion implantation and deposition |
| |
| XIE Zhi-wen,WANG Lang-ping,WANG Xiao-feng,HUANG Lei,LU Yang,YAN Jiu-chun State Key Laboratory of Advanced Welding , Joining,Harbin Institute of Technology,Harbin ,China.Influence of Si content on structure and mechanical properties of TiAlSiN coatings deposited by multi-plasma immersion ion implantation and deposition[J].Transactions of Nonferrous Metals Society of China,2011(Z2). |
| |
| Authors: | XIE Zhi-wen WANG Lang-ping WANG Xiao-feng HUANG Lei LU Yang YAN Jiu-chun State Key Laboratory of Advanced Welding Joining Harbin Institute of Technology Harbin China |
| |
| Affiliation: | XIE Zhi-wen,WANG Lang-ping,WANG Xiao-feng,HUANG Lei,LU Yang,YAN Jiu-chun State Key Laboratory of Advanced Welding and Joining,Harbin Institute of Technology,Harbin 150001,China |
| |
| Abstract: | TiAlSiN nanocomposite coatings were prepared by multi-plasma immersion ion implantation and deposition (MPIIID). The chemical composition, microstructure and mechanical properties of these coatings were investigated by energy dispersive X-ray (EDX), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nano-indentation and scratch tests. XRD patterns reveal that the main reflection in the as-deposited coating corresponds to a strong TiN (200) preferred orientat... |
| |
| Keywords: | TiAlSiN ion implantation deposition structure nanohardness |
| 本文献已被 CNKI 等数据库收录！ |
|
