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具有双绝缘层和修饰电极的薄膜场效应晶体管
引用本文:白钰,哈克,鲁富翰,蒋雪茵,张志林.具有双绝缘层和修饰电极的薄膜场效应晶体管[J].半导体学报,2008,29(4).
作者姓名:白钰  哈克  鲁富翰  蒋雪茵  张志林
作者单位:1. 上海大学材料学院,上海,201800
2. 上海大学材料学院,上海,201800;上海大学新型显示教育部重点实验室,上海,200072
基金项目:国家自然科学基金,国家重点基础研究发展计划(973计划)
摘    要:研究了具有OTS/SiO2双绝缘层结构及MoO3/Al电极结构的有机薄膜晶体管.器件是以热生长的Si02作为有机薄膜晶体管的栅绝缘层,酞菁铜作为有源层的.OTS/SiO2双绝缘层的结构提高了器件的场效应迁移率和开关电流比,降低了阈值电压.实验表明在同样的栅极电压下,具有MoO3/Al电极的器件和金电极的器件有着相似的源漏输出电流.结果显示具有OTS/SiO2双绝缘层及MoO3/Al电极结构的器件能有效改进有机薄膜晶体管的性能.

关 键 词:有机薄膜晶体管  修饰电极  双绝缘层  迁移率

OTFT with Bilayer Gate Insulator and Modificative Electrode
Bai Yu,Khizar-ul-Haq,M.A.Khan,Jiang Xueyin,Zhang Zhilin.OTFT with Bilayer Gate Insulator and Modificative Electrode[J].Chinese Journal of Semiconductors,2008,29(4).
Authors:Bai Yu  Khizar-ul-Haq  MAKhan  Jiang Xueyin  Zhang Zhilin
Abstract:An organic thin-film transistor (OTFT) with an OTS/SiO2 bilayer gate insulator and a MoO3/Al electrode configuration between gate insulator and source/drain electrodes has been investigated. A thermally grown SiO2 layer is used as the OTFT gate dielectric and copper phthalocyanine(CuPc) is used as an active layer. This OTS/SiO2 bilayer gate insulator configuration increases the field-effect mobility, reduces the threshold voltage, and improves the on/off ratio simultaneously. The device with a MoO3/Al electrode has shown similar Ids compared to the device with an Au electrode at the same gate voltage. Our results indicate that using a double-layer of electrodes and a double-layer of insulators is an effective way to improve OTFT performance.
Keywords:organic thin film transistor  modified electrode  bilayer insulator  mobility
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