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Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio |
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| Affiliation: | 1. DUT-RU International School of Information and Software Engineering, Dalian University of Technology, Dalian 116024, China;2. School of Information and Communication Engineering, Dalian University of Technology, Dalian 116024, China;1. School of Energy Science and Engineering, Harbin Institute of Technology, 92, West Dazhi street, Harbin 150001, PR China;2. Key Laboratory of Energy Thermal Conversion and Control of Ministry of Education, School of Energy and Environment, Southeast University, Nanjing 210096, PR China |
| Abstract: | A subpixel edge location method based on orthogonal Jacobi–Fourier moments is proposed in this paper to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio. The effectiveness of the proposed method is proved through the performance test of a micro-hole measuring machine with optical spherical coupling probe. Test results indicate that a blind micro-hole of 400 μm in diameter can be experimentally measured at the depth of 2000 μm with a repeatability of 40 nm and an extremity resolution of 42 nm. |
| Keywords: | Dimension measurement of micro-cavity with high aspect ratio Optical fiber spherical coupling probe Subpixel edge location |
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