基于多波长协作的切削液残留表面激光位移测量误差补偿方法

在加工测量一体化过程中,工件表面切削液残留形成的油膜会严重影响光学在机测量的精度。 现有的误差补偿方法通 常需要获取油膜介质的先验信息,如成分、厚度等。 而这些信息受加工形质、切削液随机分布等因素的影响难以实时获取。 为 此,本文提出一种基于多波长协作的切削液残留表面激光位移测量误差补偿方法。 首先设计并搭建了基于激光三角位移测量 的多波长激光测量系统,可利用多波长激光测量同一被测点位移。 通过引入柯西色散规律,建立光学系统与激光波长的解析关 系,并基于此推导出多波长激光测量内在的差分特性,最终实现误差补偿。 本文依此方法进行了实验。 结果表明补偿后测量误 差绝对值小于 0. 01 mm,与未补偿的测量数据对比,误差降低了至少 92% 。

Displacement error compensation method of laser measurement for surface with cutting fluid residue based on multi wavelength cooperation

In the process of integration of processing and measurement, the optical on-machine measurement accuracy is seriously affected by the oil film formed by cutting fluid remaining on workpiece surface. The existing error compensation methods generally require the prior information of the oil film, such as composition, thickness, etc. Nevertheless, this information is hard to obtain in real time due to factors of processing and random distribution of cutting fluid. For these reasons, a displacement error compensation method for surfaces with cutting fluid adhesion based on multi wavelength laser is proposed in this article. First, a multi wavelength laser measurement system is designed and set up based on laser triangulation, which can measure the displacement of the same measured point by using multi wavelength laser. Then, the Cauchy dispersion law is introduced to establish the analytical relation between the optical system and the laser wavelength. Next, the inherent difference property of multi wavelength laser measurement is deduced, and the error compensation is realized. Experiments are performed according to the method in this article. The experimental results show that the absolute value of measurement error after compensation is less than 0. 01 mm. Compared with the uncompensated measurement data, the error is reduced by at least 92% .