直流溅射沉积CrAlN和CrN薄膜微观结构与摩擦性能分析研究

采用直流反应溅射在304不锈钢表面沉积CrAlN和CrN薄膜。利用X射线衍射仪（XRD），扫描电子显微镜（SEM），X射线光电子能谱仪（XPS），原子力显微镜（AFM）等表征Al元素的加入对CrN薄膜成分与组织结构的影响。采用摩擦磨损试验机和3 mm的Si3N4作为对偶球测试其在不同环境下的摩擦性能，并利用Nanomap 500LS三维轮廓仪表征磨痕轮廓。研究结果表明，CrN薄膜主要物相是CrN和Cr2N相，CrAlN薄膜主要物相是CrAlN和Cr2N相。CrN薄膜的（200）晶面的CrN相呈择优取向，而CrAlN薄膜的（200）晶面的CrAlN相也呈择优取向。在CrAlN沉积的过程中，部分的Cr原子被Al原子替代形成有利于细化晶粒和提高薄膜的综合性能。因此，在所有的实验环境中，CrAlN薄膜都比CrN薄膜具有更好的抗磨损性能和低的磨损率。

Comparison of microstructure and tribological behaviors of CrAlN and CrN film- deposited by DC magnetron sputtering

CrAlN and CrN films were deposited on 304 stainless steel substrate by direct current magnetron sputtering. Effects of Al incorporation on the composition and microstructure for CrN film were investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), X-ray photoelectrons spectroscopy (XPS), Atom force microscope (AFM) in the present work, respectively. The tribological behaviors of CrN and CrAlN films were characterized by wear tester against with a diameter of 3 mm Si3N4 ball under different conditions and the wear profiles of film were characterized by Nanomap 500LS. The results showed that the main phases of CrN film were CrN and Cr2N phase and the main phases of CrAlN film were Cr2N and CrAlN phases. The CrAlN film presented a CrAlN (200) preferred orientation and CrN film presented CrN (200) preferred orientation. In terms of CrAlN film, parts of Cr atoms were taken place by Al atoms forming the CrAlN phase which was benefited to refining grain and improving the comprehensive performance of CrAlN film. Therefore, CrAlN film exhibited an excellent wear-resistance performance and lower wear rate than CrN film in all the conditions.