| 基于PCI总线的扫描电镜图像采集系统 |
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| 引用本文： | 段呈昕,罗鸣华,张永明.基于PCI总线的扫描电镜图像采集系统[J].电子显微学报,2003,22(1):79-82. |
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| 作者姓名： | 段呈昕 罗鸣华 张永明 |
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| 作者单位： | 1. 中国科学院北京科学仪器研制中心,北京,100080;中国科学院研究生院,北京,100039
2. 中国科学院北京科学仪器研制中心,北京,100080 |
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| 摘 要： | 图像采集系统是扫描电镜的一个重要组成部分，用于控制扫描电镜的扫描电源，视频图像采集，数字化与显示，电镜主控计算机与底层微机板的通讯和电镜照相，本图像采集系统基于PCI总线接口设计，硬件主要设计采用FPGA技术，实现了数字电路的模块化设计，集成度和灵活性高，目前，电镜图像卡已达到所要求的设计水平。
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| 关 键 词： | 扫描电镜 图像采集 PCI总线 现场可编程门阵列 照相 扫描电子显微镜 |
| 文章编号： | 1000-6281(2003)01-0079-04 |
Image acquisition system of scanning electron microscope based on PCI bus |
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| DUAN Cheng xin ,LUO Ming hua ,ZHANG Yong ming.Image acquisition system of scanning electron microscope based on PCI bus[J].Journal of Chinese Electron Microscopy Society,2003,22(1):79-82. |
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| Authors: | DUAN Cheng xin LUO Ming hua ZHANG Yong ming |
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| Affiliation: | DUAN Cheng xin 1,2,LUO Ming hua 1,ZHANG Yong ming 1 |
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| Abstract: | The image acquisition system of SEM was designed based on the PCI bus to control the scanning generator, the image acquisition, data communication and the photograph system. All digital circuits of the system and PCI Bus interface controller were fulfilled by FPGA with high performance. The product has six modes of the SEM: map scan, line scan, split scan, double scan, analog record and digital record, and has been tested with high performance on KYKY 3800 SEM. |
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| Keywords: | SEM image acquisition PCI bus FPGA photograph |
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