Probabilistic Weibull behavior and mechanical properties of MEMS brittle materials

The objective of this work is to present a brief overview of a probabilistic design methodology for brittle structures, review the literature for evidence of probabilistic behavior in the mechanical properties of MEMS (especially strength), and to investigate whether evidence exists that a probabilistic Weibull effect exists at the structural microscale. Since many MEMS devices are fabricated from brittle materials, that raises the question whether these miniature structures behave similar to bulk ceramics. For bulk ceramics, the term Weibull effect is used to indicate that significant scatter in fracture strength exists, hence requiring probabilistic rather than deterministic treatment. In addition, the material's strength behavior can be described in terms of the Weakest Link Theory (WLT) leading to strength dependence on the component's size (average strength decreases as size increases), and geometry/loading configuration (stress distribution). Test methods used to assess the mechanical properties of MEMS, especially strength, are reviewed. Four materials commonly used to fabricate MEMS devices are reviewed in this report. These materials are polysilicon, single crystal silicon (SCS), silicon nitride, and silicon carbide.