半导体制造车间设施规划浅析

在半导体制造业中,由于其设备的昂贵性、敏感性和制造过程的复杂性,工厂的布局一般不可以轻易更改。设计不周的不良布局将会导致庞大的物料搬运成本,无效的生产以及重新布局时所需要的大量成本。因此,工厂的设施规划已经成为半导体制造商们最关心的问题之一。本文依据设施规划的原则对半导体车间的最新布局方式作了系统的阐述。

Layout in semiconductor manufacturing plant

In semiconductor factory, the layout can not be changed randomly because of thecostliness and sensitivity of equipments and the complexity of processes. The layout designedinconsiderately will cause expensive cost of material handling, inefficient manufacture of produc-tions and a great deal of cost which relayout is required. Therefore, the layout has been the questionthat semiconductor manufacturers care most. This paper makes a systematic exposition of the latestlayout configuration of semiconductor manufacturing plant by the rules of layout in manufacturing.