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高频飞秒激光对铜片烧蚀过程热弛豫现象研究
引用本文:丁雯钰,汪帮富,王中旺.高频飞秒激光对铜片烧蚀过程热弛豫现象研究[J].激光与红外,2018,48(5):544-549.
作者姓名:丁雯钰  汪帮富  王中旺
作者单位:苏州科技大学机械工程学院,江苏 苏州 215009
基金项目:苏州科技大学科研基金项目(No.XKZ201605) 资助
摘    要:研究了铜片在不同能量密度的单脉冲飞秒激光下烧蚀的结果。 将飞秒激光烧蚀实验的结果结合双温模型在有限差分法下模拟出的数据图,从而研究不同激光能量密度与烧蚀间的联系。飞秒激光的烧蚀过程属于非平衡烧蚀,按照模拟出的数据,对铜片烧蚀过程中表面电子温度及晶格温度有了直观的认识,进而进行研究,得出整个激光烧蚀中热弛豫规律。 在不同能量密度的飞秒激光烧蚀下对电声相互作用的研究,其模拟结果有利于找出能量密度与飞秒激光烧蚀的关联,而实验图进一步表明了提升飞秒激光能量密度与加工铜材料的加工效率以及加工质量之间的意义。综合以上分析,能够得出随着飞秒激光能量密度的增加,飞秒激光烧蚀期间材料的热弛豫过程加长,烧蚀强度有所增加,材料加工后得出形貌质量提高,其对于飞秒激光烧蚀材料的研究具有很大意义。

关 键 词:飞秒激光  热弛豫过程  双温模型  非平衡烧蚀

Study on thermal relaxation in the process of copper sheet ablation by high frequency femtosecond laser
DING Wen-yu,WANG Bang-fu,WANG Zhong-wang.Study on thermal relaxation in the process of copper sheet ablation by high frequency femtosecond laser[J].Laser & Infrared,2018,48(5):544-549.
Authors:DING Wen-yu  WANG Bang-fu  WANG Zhong-wang
Affiliation:School of Mechanical Engineering,Suzhou University of Science and Technology,Suzhou 215009,China
Abstract:The ablation of copper sheet are studied by single-pulse femtosecond laser with different energy densities. According to the results of the femtosecond laser ablation experiment and the two-temperature model,the data are simulated by the finite difference method to study the relationship between the different laser energy density and ablation. The ablation process of the femtosecond laser belongs to the non-equilibrium ablation. According to the simulated data,the surface electron temperature and lattice temperature during the ablation process of the copper plate are intuitively understood,and the whole laser ablation thermal relaxation law is obtained. The simulation results show that with the increase of femtosecond laser energy density,the thermal relaxation of copper sheet during ablation becomes long,ablation intensity increases,the morphology quality improves,which has great significance for the study of femtosecond laser ablation.
Keywords:femtosecond laser  thermal relaxation process  double temperature model  non-equilibrium ablation
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