基于激光多普勒技术的PZT薄膜压电性能测试研究

应用基于激光多普勒技术的微小形变分析方法,并引入数字锁相技术,成功实现了PZT(Pb(Zr,Ti)O₃)铁电薄膜的压电性能测试。对商用压电陶瓷在小信号激励下的压电性能测试表明,数字锁相技术的引入能有效抑制系统噪声,并提高激光多普勒系统的位移检测分辨率,使其达到皮米量级。此外,研究了用溶胶-凝胶技术和溶胶-电雾化技术制备得到的PZT薄膜的电压-位移曲线和压电位移"蝴蝶线",实验结果表明:在5 V直流偏置下测得两种方法制备得到的PZT薄膜的d₃₃压电系数分别为218.7 pC/N和215.8 pC/N,相应的标准偏差分别为12.7和28.6。

Measurement of piezoelectric properties of PZT films by laser Doppler technique

Laser Doppler technique was used to measure the piezoelectric properties of PZT((Pb(Zr,Ti)O_3)) thin films.The measurement of piezoelectric properties on commercial PZT bulk indicated that the introduction of lock-in technique,which offered excellent noise rejection,raised the displacement resolution up to picometer order.Then experiments were performed on PZT films derived by sol-gel method and Electrical Spray Deposition(ESD) method.The obtained results show that the piezoelectric coefficients(d_(33)) of the two films are 218.7 pC/N and 215.8 pC/N respectively,with 5 V dc bias,and the corresponding standard deviations are 12.7 and 28.6.