微机械陀螺仪设计与研究

介绍了微机械陀螺仪的关键技术、种类、性能比较和不同应用领域对其性能参数的要求。总结了近几年国内外微机械陀螺仪结构的研究最新成果。对框架式、音叉式、振动轮式、振动环式、转子悬浮式、质量块式和双线振动式等微机械陀螺仪的结构、加工和性能等进行了分析比较。主要阐述了微机械陀螺仪的漂移误差、精度和封装技术3大研究难点和高精度、微加工维度、结构和电路优化、单片多自由度和单片集成化等研究发展趋势。

Design of and Research on MEMS Gyroscope

This paper introduces the micro electro mechanical systems gyroscope important technology,category,performance comparison and the requirements of the performance parameters in different applications.The latest research results at home and abroad in recent years on the structure of the micro electro mechanical systems gyroscope are summarized.The structure,processing and performance of the micro electro mechanical systems gyroscopes,which are frame type,tuning fork,vibration wheel,vibration ring,rotors suspension,quality block,double vibrating and so on,are analyzed and compared.Emphasis is laid on the micro mechanical gyroscopes' three research difficulties of drift error,precision and packaging technology and the research development trend of high precision,micro machining dimension,structure and circuit optimization,monolithic multi degree of freedom and monolithic integration.