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强直电流伸展弧CVD硬质合金金刚石涂层工具
引用本文:宋建华,苗晋琦,张恒大,唐伟忠,吕反修,田晶泽.强直电流伸展弧CVD硬质合金金刚石涂层工具[J].北京科技大学学报,2003,25(3):248-250.
作者姓名:宋建华  苗晋琦  张恒大  唐伟忠  吕反修  田晶泽
作者单位:北京科技大学材料科学与工程学院,北京,100083
基金项目:国家科学工程项目;863-715-Z38-03;
摘    要:采用自行研制的强电流直流扩展电弧设备对酸浸和渗硼预处理的YG6刀片进行了金刚石薄膜涂层沉积,并对放于不同位置的沉积刀片表面涂层的激光Raman谱和SEM形貌进行了分析、研究。结果表明:渗硼预处理工艺优于酸浸预处理工艺;在渗硼处理的GY6刀片上,沉积的金刚石薄膜涂层具有大面积、均匀性好和质量高的特点。

关 键 词:金刚石涂层工具  强电流直流扩展电弧  YG6刀片  硬质合金工具  CVD  渗硼预处理  酸浸预处理  表面形貌
修稿时间:2002年5月8日

Large Area Diamond Coatings on Cemented Carbide Tools by a High Current Extended DC Arc Plasma CVD System
SUN Jianhua,MAO Jinqi,ZHANG Hengda,TANG Wezhong,LV Fanxiu,TIAN Jinze Materials Science and Engineering School,University of Science and Technology Beijing,Beijing ,China.Large Area Diamond Coatings on Cemented Carbide Tools by a High Current Extended DC Arc Plasma CVD System[J].Journal of University of Science and Technology Beijing,2003,25(3):248-250.
Authors:SUN Jianhua  MAO Jinqi  ZHANG Hengda  TANG Wezhong  LV Fanxiu  TIAN Jinze Materials Science and Engineering School  University of Science and Technology Beijing  Beijing  China
Affiliation:SUN Jianhua,MAO Jinqi,ZHANG Hengda,TANG Wezhong,LV Fanxiu,TIAN Jinze Materials Science and Engineering School,University of Science and Technology Beijing,Beijing 100083,China
Abstract:High current extended DC arc plasma equipment was manufactured to carry out CVD film deposition on acid-etching and boronizing samples of the cemented carbide cutter YG6, and the surface coating of deposition at different positions of the blade were analyzed by Raman spectra and SEM. The results show that the boronizing pretreatment technology is superior to the acid etching pretreatment technology, for CVD film coating on the blade by boronizinf pretreatment has advantages of large area, good homogeneity and high quality.
Keywords:high current extended DC arc plasma  large area  homogeneity  diamond coating
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