数字PID控制技术在多功能真空离子镀膜设备中的应用

介绍了数字PID（比例-积分-微分）控制算法在多功能真空离子镀膜设备中的应用,并利用三菱Q系列PLC（可编程逻辑控制器）丰富的结构化编程功能和数字PID控制算法的运用,实现对5路气体的输出控制;在本应用中,根据工艺参数表的设定,PLC实时计算出所需气体的输出量并控制其输出,实现自动调节工艺气体的进气量,以达到稳定镀膜室气体压力的目的,保证气体放电条件,提高镀膜层质量。

Application of Digital PID Control Technology in the Multi-Function Vacuum Ion Plating Equipment

The paper describes the application of a digital PID（proportional-integral-derivative） control algorithm in the multi-function vacuum ion plating equipment.By using the rich structure program functions of Mitsubishi Q series PLC（programmable logic controller） and the digital PID control technology to realize the 5-way gases output control.In this application,PLC calculate the required gases output according to the setup of the process parameter table and adjust automatically process gases into the chamber,so as to achieve a stable coating chamber gas pressure,maintain the gas discharge conditions and improve the quality of the film.