基于应力均匀化的超纯水隔膜阀隔膜优化

超纯水隔膜阀具有结构简单、耐化学腐蚀、低离子析出等优点,多用于半导体行业,隔膜的疲劳破损是影响隔膜阀寿命和设备可靠性的关键性能指标。通过COMSOL模拟了隔膜启闭过程中的应力变化情况,并详细分析了隔膜工作时的受力特点。结果表明:隔膜启闭过程中受到的应力与阀口开度成线性关系,且阀口开度最大时出现峰值;对于小流量、低流速的超纯水隔膜阀,隔膜失效的主要因素是隔膜启闭过程中机械拉伸引起的疲劳损坏;优化后的隔膜在工作时的应力趋于均匀化,对进一步提高其工作寿命具有良好的工程指导意义。

Diaphragm Optimization of Ultrapure Water Diaphragm Valves Based on Stress Homogenization

Ultrapure water diaphragm valves are mostly used in the semiconductor industries because of their simple structure, strong chemical corrosion resistance and low ion precipitation. Diaphragm fatigue damage is the key performance index that affects diaphragm valve life and equipment reliability. This study simulates the stress in the process of the diaphragm opening and closing via COMSOL, and analyzes the stress characteristics of diaphragm while in working. The results show that the stress in the process of diaphragm opening and closing is linearly related to the valve opening degree, and the peak occurs when the valve is fully open. For ultrapure water diaphragm valves with small flow rate and low velocity, the main reason of diaphragm failure is fatigue damage caused by mechanical stretching during opening and closing. The diaphragm stress tends to be homogenized after optimization, resulting in good engineering significance to further improve the service life of the valves.