Influence of Au and Pt on the concentration profile of Mn in Si |
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Authors: | G S Kulikov Sh A Yusupova |
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Affiliation: | (1) Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia |
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Abstract: | The influence of diffusion of gold and platinum from the layer deposited on the silicon surface on the concentration profile of 54Mn in the bulk is investigated using the radiochemical technique. The data obtained indicate that the manganese concentration in the bulk of silicon is reduced due to annealing of the samples Si〈54Mn〉 with the gold or platinum layer on the surface. |
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