| 溅射技术对TiN涂层结构和力学性能的影响 |
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| 引用本文： | 谷佳宾,李建勇,李刘合,金杰,张海鹏.溅射技术对TiN涂层结构和力学性能的影响[J].表面技术,2023,52(9):160-169, 188. |
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| 作者姓名： | 谷佳宾 李建勇 李刘合 金杰 张海鹏 |
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| 作者单位： | 北京交通大学 机械与电子控制工程学院 载运工具先进制造与测控技术教育部重点实验室 北京 100044;北京航空航天大学 机械工程及自动化学院，北京 100191;洛阳轴承研究所有限公司，河南 洛阳 471039;河南省高性能轴承技术重点实验，河南 洛阳 471039 |
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| 基金项目： | 中央高校基本科研业务费专项资金(2023JBMC018，2019RC017) |
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| 摘 要： | 目的 沉积条件对Ti N涂层的组织结构和力学性能有着至关重要的影响，而溅射技术又决定了涂层的沉积条件，探究不同溅射技术对Ti N涂层的微观组织结构和性能的影响，提高Ti N涂层的力学性能和高温摩擦磨损性能。方法 采用不同的溅射技术(dcMS、Hi PMS、Hybrid)在M2高速钢表面沉积Ti N涂层，利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、sin2ψ法、纳米压痕仪、洛氏压痕法、划痕法和CSM球盘式摩擦试验机分别测试了Ti N涂层的组织结构特征、沉积速率、残余应力、纳米硬度、膜基结合力和高温摩擦磨损性能。结果 不同溅射技术制备的Ti N涂层均为柱状晶结构和Ti N (111)择优取向。HiPIMS-TiN涂层具有最高的纳米硬度(29.7GPa)和最低的膜基结合力(HF2)，而Hybrid-TiN涂层呈现出最小的残余应力、高沉积速率和高膜基结合力，其膜基结合力达到HF1级，临界载荷(Lc2)达到82.5 N。不同溅射技术制备的Ti N涂层的摩擦因数均随着温度的升高而降低，在500℃时，Ti N涂层的摩擦因数约为0.53。Ti N涂层的磨损率随着温度的升...
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| 关 键 词： | 磁控溅射 Hybrid TiN涂层 微观组织结构 力学性能 高温摩擦磨损性能 |
| 收稿时间： | 2022/9/2 0:00:00 |
| 修稿时间： | 2022/10/28 0:00:00 |
Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings |
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| GU Jia-bin,LI Jian-yong,LI Liu-he,JIN Jie,ZHANG Hai-peng.Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings[J].Surface Technology,2023,52(9):160-169, 188. |
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| Authors: | GU Jia-bin LI Jian-yong LI Liu-he JIN Jie ZHANG Hai-peng |
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| Affiliation: | College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China;College of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China; Luoyang Bearing Research Institute Co., Ltd., Henan Luoyang 471039, China;Henan Key Laboratory of High Performance Bearing Technology, Henan Luoyang 471039, China |
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| Abstract: | The microstructure properties of TiN coating are mainly affected by the deposition conditions, which in turn are affected by the sputtering technology. The proper use of the sputtering technology allows to control the state of ion bombardment during coating growth and tailors the crystal structure, thereby improving the properties of TiN coating. Therefore, TiN coatings were deposited on the M2 high-speed steel by different sputtering technologies (dcMS, HiPMS, and Hybrid) in this work. The effects of different sputtering technologies on the microstructure, mechanical properties, and high temperature wear properties of TiN coatings were investigated. |
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| Keywords: | magnetron sputtering Hybrid TiN coating microstructure mechanical properties high temperature wear property |
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