压电式微位移机构动态特性研究

压电陶瓷驱动器在较高电场的作用下将产生严重的非线性,从而影响其定位精度。压电陶瓷驱动器的非线性不仅与材料的非线性、蠕变、滞后等因素有关,还与器件的动态响应特性有关。动态响应的迟滞非线性是影响压电式微位移驱动器控制性能的一个关键因素,直接关系到控制精度的提高。该文采用前馈控制同数字比例、积分和微分环节(PID)控制相结合的复合控制算法对一维压电式微位移机构的控制过程进行校正补偿,建立了动态特性的闭环校正控制系统。实测结果表明,机构的动态响应时间显著缩短,实现了机构的快速响应。

Research on Dynamic Characteristic of Micro-displacement Mechanism Based on Piezoelectric Actuator

Piezoelectric actuator can cause severe non-linearity under higher electric field,position accuracy of mechanism will be affected.The non-linearity of piezoelectric actuator is related not only to non-linearity of material,creep and hysteresis,but also to dynamic response of actuator.The hysteresis and non-linearity of dynamic response is a key factor for piezoelectric actuator to affect improvement of controlling accuracy.With the compound control method of feed-forward and digital PID control,the closed-loop system is established to adjust dynamic response of mechanism of single degree of freedom.It is indicated by experiment that the time of dynamic response is shorten obviously,the rapid response of mechanism is realized.